Plasma process equipment maker Plasma-Therm LLC of St Petersburg,FL,USA has provided an advanced plasma processing workshop at Cornell University Nanofacility(CNF).Presentations addressed both fundamental and advanced plasma etching and deposition technologies used in semiconductor device fabrication and materials science research.
Many attendees were graduate students and post-doctoral researchers from six different universities and researchers from over 15 companies.
Dr.Shankar Radhakrishnan,Sr.engineer at Agiltron Inc,said:"I commend Plasma-Therm on a well-organized,very useful session covering the basics of plasma processing and for delving quite a bit into detail about etch and deposition processes.Although I've been involved with process development for over 10 years,I found this workshop particularly useful as it gave me a formal understanding of the processes I routinely use from a very applied perspective.It was a well thought-out schedule.I look forward to viewing the presentation slides and to incorporating concepts I have learned in future process development efforts."
Picture:Plasma-Term's advanced plasma processing workshop at Cornell University Nanofacility(CNF).
Dr.Chris Thomas,CTO at Widetronix Inc,added:"It is rare to find,in one sitting,such a global overview of etching and film deposition.Dr.David Lishan is very knowledgeable about the topics covered in the workshop,but it was the organization and method of delivery that made the workshop most effective.The presentations stripped the information to the core essentials that allow you to walk away with a better intuitive sense of the topics.This talk should be mandatory for all facility users whether they are experienced or new to processing."
"We get immediate feedback that the workshops increase understanding of these complex and critical plasma processes.It increases productivity and helps generate new ideas for the end users as well as help Plasma-Therm maintaining close ties with the latest directions in research and the technical community."explained Dr.David Lishan,Plasma-Therm Principal Scientist and organizer of the workshop series."It is particularly rewarding to work with graduate students and those new to the concepts and details of plasma etching and deposition.Being able to accelerate the learning processing across a broad range of technologies in a multidisciplinary environment helps Plasma-Therm establish long lasting relationships with individuals,institutions,and companies.We look forward to upcoming workshops at Stanford,UC Santa Barbara,UT Austin and the Institute of Semiconductors at the Chinese Academy of Sciences."
