Zeta Instruments Inc of San Jose, CA, USA, which provides optical profilers for micron-scale surface analysis, says that Rubicon Technology Inc of Bensenville, IL, USA has ordered multiple units of the Zeta-300 series optical profiler for its sapphire substrate production aimed at the high-brightness light-emitting diodes (HB-LED) market.
Rubicon says that, being sensitive to the LED maker's costs of wafer failure late in the production cycle, it will use the Zeta-300 series optical profilers for inspection and metrology of its sapphire substrates to help improve wafer yield and to lower costs for LED customers.
Zeta says that, known for cost-effective advanced functionality, its high-precision metrology systems have gained strong traction across the LED industry. The latest in its suite of optical profilers, the Zeta-300 series was designed specifically to address the stringent specifications of the patterned sapphire substrate (PSS) market. It combines PSS metrology and defect review in a system that is claimed to be unique in the sapphire industry, enabling detailed measurement of PSS structure dimensions as well as wafer defect inspection on the same system.
"We have evaluated many tools for the production environment and the Zeta 300 series delivers the best combination of speed and accuracy for precision metrology applications," comments Rubicon's president & CEO Raja M. Parvez. "Zeta's systems are integral to assuring our products meet and surpass our own internal quality specifications and those of our customers," he adds.
The Zeta-300 series leverages patented Z-Dot technology to deliver high repeatability and accuracy for the measurement of LED-patterned/etched substrates, photo-resist and stacked structures on transparent surfaces. Due to its combination of optics and algorithms, it provides what is claimed to be rapid and reliable data acquisition and analysis.
Coupled with application-specific software and a companion automated wafer handler, the Zeta-380 in particular provides imaging and measurement capabilities that are claimed to be superior to those of laser confocal microscopes. It measures and detects defects falling outside the industry certification levels that may not be detected by competing offerings, it is claimed. The firm reckons that its system design also offers greater ease of use while lowering overall cost of ownership.
"Having one of the world's largest and most esteemed PSS wafer suppliers select the Zeta-300 series as integral to its manufacturing process is powerful validation of our product strategy and development efforts," reckons Zeta's president Rusmin Kudinar. "We look forward to an ongoing trusted partnership with Rubicon."
