LayTec is proud to announce that Epistar Corp. has qualified LayTec’s in-situ metrology Pyro 400 for its GaN LED production. The LED manufacturer based in Taiwan will not use high accuracy GaN surface temperature sensing with Pyro 400.
The head of the Epitaxy Engineering Division at Epistar commented: “We are satisfied with GaN surface temperature measurement provided by Pyro 400. The tool helps us further improve MOCVD controllability and LED production yield.”
Mr. Tom Thieme, director marketing & sales at LayTec commented, “We thank the team at Epistar for working together with LayTec’s application engineers so closely. Through collaboration with this important and innovative customer, we have established our UV pyrometry tool in Epistar’s daily LED production application. We successfully demonstrated that precise wafer surface temperature control gives room for even further LED yield improvement and cost reduction.”
The Pyro 400 metrology system controls the real GaN surface temperature during epitaxial growth on infrared transparent substrates such as sapphire or silicon carbide (SiC). The tool applies ultraviolet pyrometry and provides information on the final emission wavelength of the LED already during epitaxial growth.
