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ICP RIE system
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RIT's Jing Zhang Wins NSF Career Award for Research on UV Photonics
May 18, 2018Jing Zhang, a faculty member at Rochester Institute of Technology, has received a CAREER award from the US National Science Foundation (NSF) for work to develop new, highly efficient ultraviolet light sources. Zhang’s NSF award of ...
Tags: UV LEDs, UV Photonics
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RIT Awarded NSF Grant for ICP-RIE Etch System for Photonics and Nanoelectronic Device R&D
Oct 12, 2016Jing Zhang, an engineering faculty member at Rochester Institute of Technology, has received a $305,000 grant from the US National Science Foundation (NSF) to acquire an inductively coupled plasma reactive-ion etching (ICP-RIE) system for ...
Tags: RIT, NSF, ICP-RIE system
