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Optical lithography
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EV Group Unveils Automated Metrology System for Advanced Packaging
Jul 19, 2016EV Group, a supplier of wafer bonding and lithography equipment for the MEMS, nanotechnology and semiconductor markets, introduced the EVG50 automated metrology system. Designed to support the increasingly stringent manufacturing ...
Tags: Advanced Packaging, EV Group
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Leti and European FP7 Project Partners in Silicon Photonics Supply-Chain Announce Developments on Three Mature Platforms
Nov 24, 2015CEA-Leti and its partners in the European FP7 project PLAT4M today announced they have built three silicon photonics platforms. The four-year project, which launched in 2013, aims at building a European-based supply chain in silicon ...
Tags: Leti, Silicon Photonics
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PLAT4M Silicon Photonics Supply-Chain Project Develops Three Mature Platforms
Nov 24, 2015Micro/nanotechnology R&D center CEA-Leti of Grenoble, France and its partners say that they have built three silicon photonics platforms, as they reach the mid-point of the four-year European Union Seventh Framework Program (EU FP7) project ...
Tags: Leti, silicon photonics, STMicroelectronics
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R&D Center CEA-Leti Launched a Program in NIL
Jul 20, 2015Micro/nanotechnology R&D center CEA-Leti of Grenoble, France and EV Group of St Florian, Austria (a supplier of wafer bonding and lithography equipment for MEMS, nanotechnology and semiconductor applications) have launched a program in ...
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EVG Has Unveiled The HERCULES NIL
Jul 10, 2015EV Group of St Florian, Austria (a supplier of wafer bonding and lithography equipment for MEMS, nanotechnology and semiconductor applications) has unveiled the HERCULES NIL — a fully integrated track system that combines cleaning, ...
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Nilphotonics Competence Center Has Been Established
Dec 3, 2014EV Group (EVG) of St Florian, Austria (a supplier of wafer bonding and lithography equipment for MEMS, nanotechnology and semiconductor applications) has established the NILPhotonics Competence Center, which is designed to assist customers ...
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Universities Have Jointly Developed a Self-Terminating Gate Recess Etch
Jul 15, 2013Peking and Xidian universities have jointly developed a self-terminating gate recess etch that allows them to produce aluminium gallium nitride (AlGaN) normally-off metal-oxide-semiconductor field-effect transistors (MOSFETs) with positive ...
Tags: Electrical, gate recess etch
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Belgium Has Announced The Launch of Its Fully Integrated Silicon Photonics Platform
Mar 18, 2013Nanoelectronics research center Imec of Leuven, Belgium has announced the launch of its fully integrated silicon photonics platform through a cost-sharing multi-project wafer (MPW) service via ePIXfab, the EU-funded silicon photonics ...
Tags: silicon photonics, Nanoelectronics, optical transceivers
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TSMC Signed an Agreement with ASML to Develop New Chip Making Technology
Dec 11, 2012TSMC will invest €838m to acquire 5% in ASML Taiwan Semiconductor Manufacturing Company (TSMC) has signed an agreement with Dutch firm ASML to invest €1.1bn in the latter's Customer Co-Investment Program that aims to develop new ...
Tags: extreme ultraviolet, TSMC, ASML, new chip, semiconductor
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TSMC on Oct. 23 Bought for Over NT$3.2 Billion 14.32 Hectares of Land
Nov 1, 2012Taipei, Oct. 29, 2012 (CENS)--Taiwan Semiconductor Manufacturing Co. (TSMC) on Oct. 23 bought for over NT$3.2 billion (US$106 million) 14.32 hectares of land at the Jhunan Park, an extension of the Hsinchu Science Park in northern Taiwan, ...
Tags: TSMC, Taiwan Semiconductor Manufacturing Co., chip, Intel, Samsung
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Demonstration of Functional Components Brings Si Photonics Closer to CMOS Standards
Jul 20, 2012Demonstration of functional components brings Si photonics closer to CMOS standards. imec results announced at Semicon West Imec has successfully demonstrated the creation of functional sub-100 nm photonics components on 300 mm silicon ...
Tags: Imec, OpSIS, Silicon photonics, Silicon West, CMOS, Optics
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Toshiba Corporation Has Developed Litho Probe for 11nm Masks
Jul 9, 2012Toshiba Corporation has developed an anti-wear nano-lithographic probe in collaboration with Tokyo University and BEANS laboratory.The probe is designed for making and repairing masks for next generation semiconductor production at 16-to ...
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Imec Demos Nanophotonics Components on 300mm Silicon Photonics Wafer Technology
Jul 9, 2012In conjunction with the SEMICON West 2012 event in San Francisco,CA,USA(10-12 July),nanoelectronics research center Imec of Leuven,Belgium has announced what it claims is the first realization of functional sub-100nm photonics components ...
Tags: Nanophotonics, Silicon photonics wafers, Optical lithography
