Silicon photonics wafers

Imec Demos Nanophotonics Components on 300mm Silicon Photonics Wafer Technology
Jul 9, 2012
In conjunction with the SEMICON West 2012 event in San Francisco,CA,USA(10-12 July),nanoelectronics research center Imec of Leuven,Belgium has announced what it claims is the first realization of functional sub-100nm photonics components ...

Tags: Nanophotonics, Silicon photonics wafers, Optical lithography