In-situ metrology system maker LayTec AG of Berlin, Germany says that deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany has qualified EpiNet 2016, its latest control and analysis software for EpiTT and EpiCurve TT products.
The purpose of EpiNet 2016 is to turn a metrology system's in-situ data into high-level information. "With EpiNet 2016, our customers have access to key features of LayTec Gen3 metrology tools on our Aixtron's MOCVD [metal-organic chemical vapor deposition] platform," says Aixtron's director of technology Dr Christian Geng. "The improved performance and related customized upgrade packages of EpiNet 2016 will add further values to Aixtron-driven epitaxy processes."
Source:
http://www.semiconductor-today.com/news_items/2016/jun/laytec3_2800616.shtml