Trade Resources Industry Views Advanced Energy Highlighting High-Speed Pyrometer for MOCVD at Semicon Korea

Advanced Energy Highlighting High-Speed Pyrometer for MOCVD at Semicon Korea

Tags: MOCVD, RF power

In booth 2712 (Hall A) at SEMICON Korea 2016 in Seoul (27-29 January), Advanced Energy Industries Inc of Fort Collins, CO, USA is highlighting its power and control technologies. Among its process power, high-voltage power and thermal products on display, the firm is featuring its new, floating, high-voltage bipolar power supply and next-generation high-speed pyrometer.

The UltraVolt FLHV series provides high-voltage power for the strong force of electrostatic chucks (ESC) and elevates system performance with advanced controls and monitoring as well as floating (isolated) unipolar/bipolar high-voltage outputs with high stability and reliability. The Sekidenko MXE G2 pyrometer provides high-speed temperature and reflectance measurement for deposition processes including metal-organic chemical vapor deposition (MOCVD) applications for high-brightness light-emitting diode (HBLED) production and emerging III-V materials.

"We offer exceptional temperature and reflectance measurement with the MXE G2 product for processes requiring high-speed acquisition, such as high susceptor rotation speeds commonly used for HBLED production," claims president & CEO Yuval Wasserman.

Advanced Energy is showcasing its full product portfolio for semiconductor and thin-film processing applications, including:

RF power with multi-level pulsing, enabling a wide variety of semiconductor applications and providing flexibility and adaptability for 3D, IC, VNAND and next-generation device structures; source technology uniquely suited to operate in ultra-clean semiconductor applications, enabling critical plasma-based processes with lower device damage, higher throughput and higher yields; high-voltage modules and systems for e-beam, e-chuck and other semiconductor, analytical and industrial processes that require energy density, flexibility and modularity; DC power for PVD processes used in semiconductor and display manufacturing for copper, aluminum, tantalum, titanium and newer exotic materials; thermal products (including pyrometers, optical fiber thermometers and SCR thyristor power controllers) that offer precise thermal profiles and advanced process control solutions for increased productivity, yield and throughput.

Contribute Copyright Policy