A micro-electrical-mechanical systems (MEMS) device includes a substrate, one or more anchors formed on a first surface of the substrate, and a piezoelectric layer suspended over the first surface of the substrate by the one or more anchors.
A first electrodeA solid electric conductor through which an electric current enters or leaves in a medium may be provided on a first surface of the piezoelectric layer facing the first surface of the substrate, such that the first electrodeA solid electric conductor through which an electric current enters or leaves in a medium is in contact with a first bimorph layer of the piezoelectric layer. A second electrodeA solid electric conductor through which an electric current enters or leaves in a medium may be provided on a second surface of the piezoelectric layer opposite the first surface, such that the second electrodeA solid electric conductor through which an electric current enters or leaves in a medium is in contact with a second bimorph layer of the piezoelectric layer.
