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Aix G5 WW System
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LG Innotek Using Aixtron Aix G5 WW System to Develop SiC Epiwafers
Mar 13, 2016Deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany says that Seoul-based LG Innotek (a subsidiary of South Korean electronics company LG Group) has selected an AIX G5 WW (Warm-Wall) reactor for the development of ...
Tags: SiC Epiwafers, Aix G5 WW System
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Japanese Manufacturer Showa Denko Qualify Its Most Recent System for Manufacturing Sic
Oct 31, 2014Deposition equipment maker Aixtron SE of Aachen, Germany says that Japanese manufacturer Showa Denko has qualified its most recent system for manufacturing silicon carbide (SiC) epitaxial wafers. The new AIX G5 WW (Warm-Wall) chemical vapor ...