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reflectance measurement
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Advanced Energy Highlighting High-Speed Pyrometer for MOCVD at Semicon Korea
Feb 3, 2016In booth 2712 (Hall A) at SEMICON Korea 2016 in Seoul (27-29 January), Advanced Energy Industries Inc of Fort Collins, CO, USA is highlighting its power and control technologies. Among its process power, high-voltage power and thermal ...
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A Major Challenge Is The Combination of Curvature Measurements
Mar 21, 2013A major challenge of in-situ metrology on single-port reactors with small viewport geometries is the combination of curvature measurements (by blue laser) with reflectance measurement at a wavelength of 405nm, says LayTec AG of Berlin, ...
Tags: LayTec, blue laser, reflectance measurement
