Veeco Instruments Inc of Plainview, NY, USA has formed a strategic partnership with Rudolph Technologies Inc of Flanders, NJ, USA, which provides defect inspection, process control metrology, and data analysis systems and software. The collaboration allows users of Veeco's etch and deposition equipment access to Rudolph's fault detection and predictive maintenance software to increase system productivity and improve manufacturing efficiency.
As part of the partnership, Rudolph and Veeco will also develop technology-specific software solutions that work in unison with Veeco's existing software to enhance tool performance for its new etch and deposition equipment, as well as upgrades for Veeco's large global installed base. Rudolph's software framework applies to many tool types and processes. When combined with Veeco's tools and system knowledge, the software optimizes real-time and historical data, freeing system users from manual monitoring of equipment and processes, Veeco says.
"Aggregating data is essential to improving yields, maintaining system up-time and lowering production costs," says Guy Shechter, vice president, Veeco Certified Equipment and Services Marketing. "Rudolph's software platform supports Veeco's goal of delivering innovative high-performing etch and deposition systems," he adds. "We expect to optimize equipment production, prevent process failures and anticipate maintenance work more efficiently."
The scalable software system architecture is flexible enough to use in a variety of high-tech manufacturing environments, allowing OEMs to optimize equipment productivity for their target markets and applications. Rudolph currently has thousands of software monitoring tools in hundreds of different process areas worldwide, enabling users to run more efficiently and achieve higher yields, the firm says.
"Partnering with a capital equipment leader like Veeco demonstrates the importance of yield analysis and data-mining in maximizing production results, not just for fabs but also for top OEMs," says Michael Plisinski, VP & general manager of Rudolph's Data Analysis and Review business unit. "By combining Veeco's process know-how and equipment knowledge with our tailored software solutions, the partnership will help Veeco improve their customer's bottom-line results through more efficient manufacturing."
