Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA says that a leading US wireless compound semiconductor device manufacturer has placed follow-on orders for Plasma-Therm VERSALINE wafer processing, etch modules. The process modules will support RF power amplifier and switch chip production with advanced backside GaAs via formation. Plasma-Therm did not disclose the name of the customer.
The process modules include Plasma-Therm’s EndPointWorks technology and unique active feedback chamber temperature management to ensure maximum etch yield, reproducibility and uptime productivity. The latest orders compliment an installed base of Plasma-Therm VERSALINE and Versalock systems at the customer’s site, which are being used for multiple plasma-processing steps, including both deposition and etch.
Dr David Lishan, Plasma-Therm’s director-technical marketing, said, “Based on a history of repeat orders, Plasma-Therm has been a key supplier to wireless compound semiconductor manufactures for many years. Follow-on orders are especially encouraging as they confirm we are continuously providing solutions that meet the expectations of our customers. On time solutions, whether for capacity or technology needs, are a result of close collaboration with our customers.”
