Plasma process equipment maker Plasma-Therm LLC of St Petersburg, FL, USA has provided an advanced, one-day plasma processing workshop at The University of Texas at Austin Microelectronics Research Center (MRC), part of the NNIN (National Nanofabrication Infrastructure Network).
Presentations addressed both fundamental and advanced plasma etching as well as deposition technologies used primarily in semiconductor device fabrication and materials science research. Attendees included graduate students, facility staff, post-doctoral researchers, and engineers, many involved in projects requiring process capability spanning a broad range of research topics as diverse as solar energy, nanostructures, data storage, opto-telecommunications, and MEMS.
Plasma-Therm has held similar one and two day workshops at prominent institutions in Singapore, United States, Sweden, China, and Israel during the last year.
Prof. Sanjay Banerjee, director at UT Austin’s MRC, said, “The recent workshop on plasma etching and deposition provided by Dr. David Lishan of Plasma-Therm was attended by over 70 people from the University of Texas and other schools and industrial labs. Extremely valuable training was provided about the fundamental physics of plasma processing, as well as practical insights about plasma etching and deposition.”
“The high attendance at these workshops is evidence of significant enthusiasm for information relating to semiconductor and materials processing.” said Dr. David Lishan, Plasma-Therm principal scientist and workshop organizer. “Providing technical communities such as the one in Austin, with these plasma processing workshops is personally very satisfying and exposes Plasma-Therm to leaders in R&D in many different disciplines.”
