Deposition equipment maker Aixtron SE of Herzogenrath,Germany has received a multi-tool order for its next-generation QXP-8300 atomic layer deposition(ALD)system from a leading Korean DRAM manufacturer.The production system for sub-30nm DRAM technology nodes will help to accelerate high-volume manufacturing of the most advanced DRAM technology node available.
"The Aixtron QXP-8300 was chosen over other competitive ALD products based on its superior film quality,excellent defect control and best-in-class productivity,"says Dr Sasangan Ramanathan,chief technical officer at Aixtron Inc.
"We are very pleased that the leading Korean memory manufacturer has decided to select the QXP-8300 for their advanced DRAM chip manufacturing,and we look forward to supporting their ramp-up in production,"adds Dr Bernd Schulte Aixtron's executive VP&chief operating officer.
