Deposition equipment maker Aixtron SE of Herzogenrath, Germany says that in Q3/2012 long-term customer Formosa Epitaxy Inc (FOREPI) of Taiwan placed an order for multiple CRIUS II-L MOCVD production systems in a 69x2-inch configuration. All systems will be used for the manufacturing of ultra-high brightness (UHB) GaN-based blue and white LEDs.
Aixtron’s local service team started installing and commissioning the new systems in Q4/012 at FOREPI’s new factory in the Pin-Jen industrial zone, Taiwan. Delivery will be completed in Q2/2013. Earlier in 2012, FOREPI purchased several CRIUS II-XL and AIX G5 HT reactors.
“This new order reflects our on-going satisfaction with Aixtron’s products,” said FOREPI’s chairman Dr. Frank Chien. “Aixtron has proven itself as an excellent partner, providing superior customer care by responding to our requests and delivering the needed solutions. With short time-to-production, and highest performance and throughput, Aixtron’s latest MOCVD generations meet the specific challenges of larger wafers and maximum chip yields.”
All CRIUS II-L systems will be delivered with Aixtron’s new ARGUS Topside Temperature Control (TTC) system. The new method eliminates temperature variation within each run and run-to-run, enabling unmatched production yields, says the firm.
“This latest multiple tool order reflects FOREPI’s growth as a top-tier LED chip manufacturer. We are pleased to support this prized customer with our latest technology. Besides reactor size and design, we believe that successful in-situ measurement and control offer the greatest optimization potential because they provide a direct impact on yields,” said Dr. Christian Geng, general manager Aixtron Taiwan.