Aixtron SE of Aachen, Germany, has launched the Crius II-XL MOCVD reactor with a configuration offering a capacity of up to 19x4 inch. The company claims that the system offers the highest throughput and productivity, and best-in-class cost of ownership and footprint efficiency. Aixtron says that this latest version of the Crius reactor family is again a result of a detailed analysis of market requirements, especially with respect to LED manufacturing cost.
Aixtron notes that Crius II-XL builds on the hardware setup of its Crius II-L. In addition to offering what the company describes as ultimate process stability and robust operation through many years, the standard features of system include an in-situ reactor height adjustment, allowing a choice optimum reactor geometries for processes, and the company's Argus in-situ monitoring device.
"There is a strong need for cost-efficient LED manufacturing, and we know how much MOCVD can contribute to this cost reduction," said Dr. Rainer Beccard, Vice President of Marketing at Aixtron. "Amongst many parameters, it is the reactor capacity which has the biggest impact on the total cost of ownership. Thus we have decided to design a 19x4 inch setup. This configuration has been extensively tested in Aixtron's application lab, making sure it provides perfect uniformity and yield together with its impressive capacity. The system is optimized for wafer sizes between 2 inch and 8 inch; changing from one wafer size to another requires a simple carrier plate exchange without further hardware or process adjustment."
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