According to Oxford Instruments,it has sold its 400th plasma system to a Chinese HBLED supplier.
Dan Ayres,Managing Director of Oxford Instruments Plasma Technology,said that"It gives me a great sense of achievement to say that we have helped to enable the HBLED revolution.Our systems play a vital role in manufacturing HBLEDs,and we have served the industry as it has developed from its R&D roots into the global industry it is today."
Ayres continues,"We have been able to offer systems for high performance every step of the way,developing our tools to match customer demands as the market has evolved.Our PlasmaPro range of systems offers both batch and single wafer solutions to manufacturers,using the latest technologies available,developed by our expert technology and applications teams."
Oxford Instruments produces plasma equipment for etching of sapphire and GaN and also PECVD tools for depositing the dielectric layers essential for the finished HBLED devices.
