4 September 2012 Osaka university orders Aixtron BM Pro system
Deposition equipment maker Aixtron SE of Herzogenrath,Germany has announced that in Q3/2012 Japan's Osaka University ordered an Aixtron BM Pro system,capable of handling 4-inch substrates.
Professor Matsumoto and Assistant Professor Maehashi and their team at the Department of Semiconductor Electronics,Institute of Scientific and Industrial Research(ISIR),will use the system to produce carbon nanotube(CNT)and graphene structures for bio-sensors,with the aim of combining graphene field-effect transistors with organic chemicals,such as antibodies,antigens and aptamers,to allow electrical detection of specific proteins.The system will also be used to produce CNT for micro-electromechanical-systems(MEMS)and energy storage devices.
Dr.Ken Teo,Director of Nanoinstruments at Aixtron,reports:"Our system was chosen by Osaka University because it offers a cost-effective,turn-key solution that enables researchers to spend more time on device specifics as we take care of the CVD process complexity.The ease of use,flexibility and proven recipes of the BM Pro system allows customers to reliably grow several types of nanotubes and graphene in a reproducible manner.This is ideal for device development where process stability is a must.Our technology allows easy process transfer into large scale-production on 300 mm wafers by using the BM 300T system."
BM Pro incorporates high performance heaters with ramp rates up to 300°C/minute,top side wafer temperature control,pulsed plasma and automatic process recipes.The equipment is suited to meet the need for growing different types of graphene and carbon nanotubes with high consistent quality.Designed for a multi-user laboratory,the system provides detailed data recording functions,safety interlocks and an integrated reactor camera for safe process viewing.