fourth generation wafer inspector

KIA-Tencor Corp Launched Its Next-Generation LED Patterned Wafer Inspection Tool
Dec 11, 2012
Process control and yield management solutions provider KLA-Tencor Corp of Milpitas, CA, USA has launched its next-generation LED patterned wafer inspection tool. Designed specifically for defect inspection and 2D metrology for LED ...

Tags: KLA-Tencor, ICOS WI-2280, fourth-generation wafer inspector