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Nuclear Fusion Research Has Lead to a Source of EUV Source for Lithography
Jul 9, 2012Nuclear fusion research at the University of Washington has lead to a source of extreme ultra-violet(EUV)for lithography. EUV lithography at 13.5nm is one of the techniques proposed to continue'Moore's Law'below 10nm,replacing 193nm light ...
Tags: EUV, EUV sources, silicon, manufacture microchips
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