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EVG Introduced The EVG Phable Exposure System
Nov 21, 2013EV Group (EVG) of St Florian, Austria, a supplier of wafer bonding and lithography equipment for MEMS (microelectromechanical systems), nanotechnology and semiconductor applications, has introduced the EVG PHABLE exposure system, which is ...
Tags: EVG PHABLE, non-contact litho system, manufacturing photonic components