Epitaxial deposition and process equipment maker Veeco Instruments Inc of Plainview, NY, USA says that Xiamen-based Sanan Optoelectronics Co Ltd, China’s largest LED maker, has ordered 50 TurboDisc EPIK700 gallium nitride (GaN) metal-organic chemical vapor deposition (MOCVD) reactors for high-volume LED production. Thie order is the equivalent of 25 EPIK700 MOCVD ‘C2’ (cluster) systems. In keeping with its bookings policy, Veeco will record the purchase order as deposits are received.
“Sanan chose the EPIK700 due to its industry-leading cost-of-ownership model and excellent footprint efficiency,” comments Sanan’s vice chairman & CEO Zhiqiang Lin. “Our beta testing of EPIK700 proved its production-worthiness, and we are confident in its capabilities and value to our Xiamen business expansion plans,” he adds. “Veeco has been a great partner for Sanan as we have solidified our position as the top LED manufacturer in China and increased our business outside of China as well.”
Based on Veeco’s proven TurboDisc technology, the EPIK700 MOCVD system enables users to achieve a cost-per-wafer saving of up to 20% compared with previous-generation MOCVD systems through improved wafer uniformity, reduced operating expenses and increased productivity, says the firm.
“This large order from Sanan, the largest single purchase order Veeco has received since 2009, speaks volumes about the EPIK700’s production readiness and the recovery in the MOCVD market,” says Veeco’s chairman & CEO John Peeler.
Available in one-and two-reactor configurations and said to be LED industry’s highest-productivity MOCVD system, the EPIK700 features technologies including the new IsoFlange center injection flow and TruHeat wafer coil technologies, providing homogeneous laminar flow and uniform temperature profile across the entire wafer carrier. These innovations produce wavelength uniformity to drive higher yields in a tighter bin. Veeco says that the EPIK700 offers a 2.5x throughput advantage over other systems due to its large reactor size. Designed for mass production, it accommodates 31x4”, 12x6” and 6x8” wafer carrier sizes. Users can easily transfer processes from existing TurboDisc systems to the new EPIK700 MOCVD platform for quick-start production of LEDs. Because of the flexible EPIK700 MOCVD platform, more upgrades, added benefits and future enhancements will continue to differentiate the system, reckons Veeco.
