Altatech of Montbonnot, near Grenoble, France (a subsidiary of Soitec since January 2012) has received an order for its Orion LedMax wafer inspection and metrology system from Osram Opto Semiconductors GmbH of Regensburg, Germany.
Osram will use the tool to improve the performance, cost efficiency and yield of its LED processing operations. Suitable for both volume manufacturing and R&D applications, the inspection system will perform production control and new product qualification of Osram’s epitaxial wafers used in fabricating LEDs.
Capable of inspecting wafers from 4-inches to 8-inches in diameter, the Orion system combines the diverse capabilities of 2D inspection, defect height measurement and dark-field inspection in one platform, producing what are claimed to be the industry’s most thorough wafer-metrology results. The tool generates more information than just diffracted light signature, identifying potentially critical defects amid noisy backgrounds, providing superior matching performance and reducing maintenance costs, it is claimed.
Orion offers the full range of inspection and metrology capabilities for front-end manufacturing process flows including incoming wafer qualification, process development and line monitoring. Proprietary Orion modules are designed to conduct front-side and back side surface inspection, edge inspection, bump and through-silicon via (TSV) metrology by detecting, counting and classifying defects on patterned and unpatterned wafers.
