KLA-Tencor has announced its next-generation LED patterned wafer inspection tool, the ICOS WI-2280. Designed specifically for defect inspection and 2D metrology for LED applications, the ICOS WI-2280 also provides enhanced inspection capabilities and increased flexibility for microelectromechanical systems (MEMS) and semiconductor wafers spanning 2-8 inches in size.
KLA-Tencor indicated that the ICOS WI-2280 represents its fourth-generation LED wafer inspection system, which delivers sensitivity with increased throughput for reduced cost of ownership. Additionally, the tool supports handling of whole wafers in carriers and diced wafers in hoop ring or film frame carriers to accommodate multiple media with minimal equipment changeover time. The WI-2280 also features an enhanced rule-based binning defect classification and recipe qualification engine, enabling manufacturers to achieve faster yield learning during production ramps, as well as improve process control and process tool monitoring strategies in their manufacturing process
"Increasingly, LED manufacturers are demanding improved detection and classification of yield relevant defects of interest, which enables them to take faster corrective actions to improve their yields at higher inspection throughput. There is also a growing need to boost productivity by enabling faster production recipe creation," said Jeff Donnelly, group VP, growth and emerging markets (GEM) at KLA-Tencor. "The ICOS WI-2280 addresses critical market requirements – ultimately enabling LED manufacturers to achieve better lumens per watt and lumens per dollar performance."
In addition to LED application environments, MEMS, semiconductor, compound semiconductor and power device markets can leverage the ICOS WI-2280 tool for back-end-of-line and post-dicing outgoing quality control or binning; front-end-of-line patterned wafer inspection for baseline yield improvement, rework, excursion control or overlay; and 2D surface inspection and metrology, KLA-Tencor said.
As part of KLA-Tencor's LED portfolio, the ICOS WI-2280 works in conjunction with KLA-Tencor's Candela LED unpatterned wafer inspection system and Klarity LED automated analysis and defect data management system for end-to-end inspection coverage.
KLA-Tencor ICOS WI-2280 LED wafer inspection system
