Deposition equipment maker Aixtron SE of Herzogenrath, near Aachen, Germany has received an order for multiple AIX 2800G4-TM MOCVD cluster tools from Chinese optoelectronic manufacturer Xiamen Changelight Co Ltd to expand its production capacity for gallium arsenide (GaAs)-based red, orange and yellow (ROY) LEDs.
Each production cluster consists of two multi-wafer AIX 2800G4-TM process modules with susceptor configurations of 15x4-inch and one automation module serving both process modules, to enable high-volume manufacturing. Aixtron says that users benefit from maximized throughput as well as what is claimed to be the industry’s highest product yield and chemicals efficiency, setting a benchmark for the lowest cost per wafer.
“As a consequence of the increasing acceptance in numerous lighting and display applications such as smart lighting, city lighting and fine-pitch display technology, market demand for ROY LEDs is getting stronger and therefore requires continuous capacity expansion by manufacturers,” says Changelight’s vice general manager Niu Xingsheng. “As we have been very pleased with Aixtron’s reliable AIX 2800G4-TM platform and excellent service over the years, we decided to add further systems to the tools already in production,” he adds.
“Aixtron’s AIX 2800G4-TM platform has built itself a reputation as the tool of record for the production of GaAs-based ROY LEDs, VCSEL [vertical-cavity surface-emitting lasers] and thin-film solar cells,” claims Aixtron’s president Dr Bernd Schulte. “We are looking forward to continue our longstanding, trustful collaboration with Changelight.”
