Advanced Vacuum of Lomma, Sweden, which supplies vacuum solutions ranging from plasma etch and deposition systems through chemical pump systems to thermal/vacuum environmental test chambers, has launched the Apex SLR, a robust ICP system based on parent firm Plasma-Therm’s proven Shuttlelock (SLR) platform but with a much smaller footprint and benefitting from years of proven SLR technology and an extensive process library. With over 50,000 cycles of testing, the Apex will provide the reliability and availability that researchers need, the firm reckons.
“This tool expands and complements our product portfolio with a logical extension into high-density ICP plasma processing,” says Advanced Vacuum’s CEO Thomas Engstedt. “This ICP system is a perfect fit for R&D and pilot production,” he adds.
With a small footprint, high reliability, ease of use and ergonomic design, the Apex SLR suits a wide range of uniform, high-quality ICP etch applications. It is a load-lock ICP system with an easy four-button control for processing in a <1.0m2 footprint. The Apex SLR was designed incorporating Plasma-Therm’s Shuttlelock SLR technology, repackaged with updated, tier-one components. Built and controlled with trusted programmable logic control (PLC) DeviceNet software on a Windows-based operating system, the Apex SLR achieves high uptime with low, simple maintenance, it is claimed. The Apex SLR is backed by Plasma-Therm’s 15 continuous years of VLSI awards for customer satisfaction, and the global service network is ready to install and support the Apex SLR anywhere worldwide.
“The introduction of the Apex SLR will enhance Advanced Vacuum’s positioning in served markets and will make high-value technology accessible to researchers at an affordable price,” says Jim Pollock, executive VP of sales for Plasma-Therm. “The SLR ICP has long been a respected tool in the industry for its reliability, low maintenance and repeatable processing,” he adds. “Reintroduced by Advanced Vacuum in a smaller footprint, the Apex SLR will continue that same legacy for years to come.”
