SEMI-GAS Systems, a division of Applied Energy Systems Inc of Malvern, PA, USA and a manufacturer of ultra-high-purity gas handling and distribution systems, offers a simplified line of semi-automatic valve manifold boxes that facilitate pressure regulated gas delivery to multiple points-of-use.
With fewer components to potentially fail, Nanoturion Single Emergency Shut Off (ESO) Semi-Automatic Valve Manifold Boxes (VMBs) minimize production downtime, system maintenance and equipment costs, says the firm. The VMBs are ideal for use in critical semiconductor, LED and research and development applications.
SEMI-GAS semi-automatic VMBs are available in 4, 6, and 8 stick models, each featuring a simplified rail-mounted stick design for easy maintenance and expansion to accommodate fab additions, process changes and new tool installations. Individual process sticks are pressure regulated and the lines are isolated for localized gas control.
To minimize human-system interaction and ensure the safest operating conditions, each unit includes a GigaGuard Emergency Shutdown System (ESS) Controller that continuously monitors system conditions and automatically interrupts gas flow in the event of an alarm. Emergency shutdown can also be operator activated via an abort button and/or via a remote shutdown input. LED lights display constant system status and accompany an audible alarm to signal hazardous conditions. The controller's 11 programmable inputs are easily tailored to meet user specific requirements and allow for supplemental network and communications.
The standard 4 stick model is compact at 37" tall, 22" wide and 12" deep and includes a UL-approved fire sprinkler as well as integrated wall or rack mount attachment points. The enclosure is constructed of welded 11 Ga steel, with a 1/4" thick safety glass window and a self-closing, self-latching door.
Jim Murphy, SEMI-GAS division manager said, "This basic version of our Nanoturion VMB product line is perfect for the segment of our customer base who seek a simplified, low cost, safe method of distributing process gases."
