Materials, component and precision system supplier Ferrotec Corp of Santa Clara, CA, USA (whose Temescal division of Livermore, CA, USA makes electron-beam-based evaporative coating systems) says that a Temescal UEFC series evaporator - the first Auratus Enhanced system to be installed in China - will be delivered to the new gallium arsenide (GaAs) foundry Hangzhou Liangdongxin Microelectronics, which has been established by China-based power semiconductor firm Hangzhou Li-On Microelectronics Corp (founded in 2002 with processing, quality and management technology transferred from On Semiconductor). With the addition of the Temescal UEFC system to the Liangdongxin foundry, customers can benefit from near-perfect uniformity and reduced material consumption, says Ferrotec.
"With the growth of mobile devices in China and the expansion of IoT (Internet of Things), the demand for the next generation of semiconductor devices based on GaAs material is growing," says Liangdongxin's chief operating officer Dr William Wang. "We need a tool that could deliver high production throughput, consistent process uniformity, and operational efficiency to minimize our total cost of ownership. After a rigorous evaluation process, we concluded that Ferrotec's Temescal UEFC system is the best evaporator in meeting our specifications for thickness, composition and particulate control," he adds.
"The Chinese government has committed to becoming more self-sufficient in the manufacturing of semiconductor devices, and Hangzhou Liangdongxin Microelectronics' new GaAs-based foundry will enable the production of leading-edge devices that power mobile and IoT," says Gregg Wallace, managing director of Temescal Systems at Ferrotec. "Ferrotec's Temescal UEFC evaporator is a workhorse in the production of compound semiconductor devices, and our Auratus Deposition Process Enhancement Methodology delivers unmatched product quality and operating efficiency," he claims. "We look forward to strong growth from Hangzhou Liangdongxin Microelectronics and this tool will be an exceptional fit with their expanding GaAs foundry business."
In China, Temescal evaporators are supported by long-term representative MPS (Micro-Power Scientific Corp).
