ClassOne Technology of Kalispell, MT, USA, which manufactures wet-chemical processing equipment (especially for emerging markets and other cost-conscious users of ≤200mm substrates), has sold a Solstice S8 plating system to semiconductor laser manufacturer TRUMPF Photonics Inc of Cranbury, NJ, USA (part of TRUMPF Inc, the North American subsidiary of TRUMPF GmbH near Stuttgart, Germany), which produces diode chips, optics and electronics as well as pump and direct-diode modules. The new system will be used for high-precision gold plating and metal lift-off.
"For these particular TRUMPF applications, process uniformity was extremely important, and fortunately the Solstice is very strong in that department," says ClassOne's chief technology officer Kevin Witt. "The unique elegance of the Solstice system design allows users to control processes very precisely and consistently. In this case, we needed to be able to control the stress within the deposited films, and we were able to demonstrate that quite effectively," he adds. "We were also able to prove ClassOne's expertise and support by helping TRUMPF develop their target processes," says Win Carpenter, ClassOne's VP of global sales.
The Solstice S8 is a fully automated eight-chamber electroplating tool that delivers capacity of up to 75wph (wafers per hour). Specifically designed for substrates with a diameter of less than 200mm (either transparent or opaque), Solstice can perform a range of electroplating and related processes (high-pressure metal lift-off, resist strip, UBM etch etc) using various metals and alloys. The product family also includes the Solstice LT for process development and the four-chamber Solstice S4 for mid-range production. ClassOne claims that Solstice pricing is less than half that of similarly configured 300mm plating systems outfitted for 200mm from the large manufacturers.
