Deposition equipment maker Aixtron SE of Herzogenrath, Germany says that China's Wuhan Huagong Genuine Optics Tech Co Ltd (HG Genuine), a developer and manufacturer of optical components in China, has ordered a 6x2-inch Close Coupled Showerhead (CCS) epitaxial deposition system for production of light emitting and detection devices on indium phosphide substrates.
Picture: Aixtron's 6x2-inch CCS MOCVD epitaxial deposition system.
Aixtron's CCS 6x2-inch system is designed for research and production. Processes developed using the CCS systems can be easily scaled up for deployment on the larger mass-production CRIUS platforms, says the firm. The three-zone heater of the CCS provides best temperature uniformity standards.
HG Genuine's chief scientist, Zhaozhong Wang, said: "This repeat-order reflects our complete satisfaction with the performance of Aixtron's technology. Our existing system has demonstrated versatility, ease of operation and reproducibility. With the new system we will be able to carry out our planned expansion of capacity and to develop high quality epitaxy products. I am looking forward to another smooth ramp-up as well as the excellent service, installation and operation we have come to expect from Aixtron's service team."
HG Genuine possesses complete mass production lines for epitaxy, chip fabrication, devices, optical modules and subsystems. The product range covers semiconductor laser and detector chips, active devices and transceivers, which are widely applied in digital communication, analog communication and optical sensors.
