Spatial pattern recognition Spatial pattern recognition (SPR) looks for relationships among defect locations on the substrate surface. When detected, spatial patterns can often lead to rapid identification of the defect's root cause (Fig. ...
Tags: MOCVD, MOCVD epitaxial process
LED manufacturers invested heavily in production equipment in 2010–2011, driven primarily by demand for backlighting for flat panel displays in TVs and computers. Although this driver has moderated and there is currently an oversupply ...
Tags: MOCVD, MOCVD epitaxial process