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k-Space Introduces KSA Scanning Pyro Tool for MOCVD Epiwafer Production
Sep 17, 2015k-Space Associates Inc of Dexter, MI, USA (which supplies thin-film metrology tools for the semiconductor, compound semiconductor and solar markets) has introduced its kSA Scanning Pyro in-situ tool, which is designed to measure temperature ...
Tags: k-Space Associates, MOCVD, Scanning Pyro