LayTec AG of Berlin, Germany (which makes in-situ metrology systems for thin-film processes, focusing on compound semiconductor and photovoltaic applications) has signed a strategic OEM agreement with Evatec Ltd of Flums, Switzerland, a supplier of thin film deposition systems. LayTec will equip Evatec with high precision in-situ metrology tools for versatile process control.
LayTec’s EpiCurve TT metrology tool is already used with Evatec sputter systems for stress management of metal multi-layers for opto-electronic. EpiCurve TT enables strain-engineering of the multi-layer structures by real-time tuning of the sputter parameters.
Evatec’s senior process engineer Silvia Schwyn Thiny said: “With LayTec’s state-of-the-art in-situ metrology we are able to meet the growing demands on precise process control and optimization, which is the key to high yields and low costs.”
“For LayTec, an OEM cooperation with Evatec is of strategic importance”, said LayTec‘s CEO Dr. Thomas Zettler. “It will enable implementation of our metrology into processes beyond LayTec’s established applications. And when Swiss precision meets German quality standards, the expectations can never be too high.”