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Microsystems Technology Laboratories
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MTL, Cambridge, MA in December Was Well Attended
Jan 4, 2013UK-based Oxford Instruments Plasma Technology (OIPT) reports that its first workshop held at MIT’s Microsystems Technology Laboratories (MTL), Cambridge, MA in December was well attended. The workshop addressed the latest research and ...
Tags: OIPT, Plasma, ALD PECVD, Microsystems Technology Laboratories
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OIPT Will Hold a 1 Day Seminar Addressing The Latest Research and Technologies
Oct 19, 2012UK-based etch,deposition and growth system maker Oxford Instruments Plasma Technology(OIPT),part of Oxford Instruments plc,and MIT's Microsystems Technology Laboratories(MTL)of Cambridge,MA,USA will hold a 1 day seminar addressing the ...
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MIT Researchers Found Post-Etch Anneal Dramatically Improves InGaAs QWFET Performance
Jun 1, 2012Massachusetts Institute of Technology (MIT) researchers have found that a post-etch anneal dramatically improves the performance of their self-aligned indium gallium arsenide (InGaAs) quantum-well metal–oxide–semiconductor ...